1. Online analysis of gas components :
1) IGS FT-IR On-line gas analyser(Nicolet) |
2) HPR-20QIC (Hiden) |

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3) Gas chromatograph ( Agilent 6890 U.S. SRI 8610C , -1790F /1790T etc.) |
4) S710 CO/CO2/CH4/N2O (Sick/Maihak) |

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5) MINI-HICON Ozone Analyzer |
6) OmniStarTM(Pfeiffer) |

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2. Plasma diagnosis :
1)SR-750-B1(ANDOR) |

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3.Catalyst characterization:
1)TENSOR 27 FTIR ( Bruker ) |
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2) AutoChem Ⅱ 2920 (Micromeritics) |
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